the key technical indexes
products
Model No.
element（wt%）
Purity(%)
relative density(%)
Resistivity(mΩ·cm)
Size
Si-Al target
SA10
Si:Al=90:10
>99.9
>99
0.14
All
The main content of impurities
Element
Fe
P
Ca
Cr
Content（%）
0.029
0.0001
0.01
0.0018
